TOP TECH INCORPORATION



 

INDEX

1. COMPANY DESCRIPTION

2. ORGANIZATION

3. SERVICE CONTRACT

4. LIST OF REPAIRED ROBOTS BY TOPTECH (2003)

5. ROBOT ASSEMBLY



 

 

 

 

 

 

 

 

 

 

 

1. COMPANY DESCRIPTION



 

 

COMPANY:  TOP TECH INC.

ADDRESS:  NO.1003, 1004 Suntech City, 513-15, Sangdaewon-Dong

Joongwon-Gu Sungnam-City, Kyeonggi-Do, 462-807, Korea

TEL:  82-31-777-1250

FAX:  82-31-777-1268

E-MAIL:  toptech1@hanafos.com

 

 

 

 

 

 

 

¢Â BUSINESS DESCRIPTION

 

¢À ROBOT REPAIR & OVERHAUL

(TRANSPORT AND MEASUREMENT EQUIPMENT FOR LCD & FAB SYSTEM)

 

¢À ROBOT UP-GRADE 

¢À ROBOT REFURBISHMENT

 

¢Â ROBOT MAKER

 

¢À  GENMARK ROBOT ASSEMBLY & CONTROLLER

  (MODEL: GB3, GB4, GB4P, PRE ALIGNER)

 

 

 

¢À  BROOKS ROBOT ASSEMBLY

(MODEL: MTR5, VTR5, Z-BOT)

 

¢À  PRI (EQUIPE) ROBOT & PRE ALIGNER ASSY & CONTROLLER

(MODEL: ATM-100, ATM-200, PRE ALIGNER)

 

¢À  MECS ROBOT ASSEMBLY & CONTROLLER

(MODEL: UTS-100, 200, 800, 1000, 3400)

 

¢À  FUSION ROBOT ASSEMBLY

 

¢À  YASGAWA ROBOT ASSEMBLY ( MODEL : SV3 )

 
¢Â GENMARK AUTOMATION
GB3 ROBOT
GB4 ROBOT
GB4P ROBOT

 

( 2 LINKS )

( 3 LINKS )

(2 LINKS )


¢Â GENMARK AUTOMATION

 

 

GB7 ROBOT

GB8 ROBOT

GPR-SM ROBOT

 

 

 

 





(MULTI-JOINT)

 

 

 

 

 

 

( MULTI-JOINT )

(MULTI-JOINT)

 

 


 
¢Â GENMARK AUTOMATION

 

 

GB4P CONTROLLER

GB4 CONTROLLER

GB3 CONTROLLER


 

 

 

 

 

 

 

 

¢Â BROOKS AUTOMATION

Z-BOT ROBOT

MTR 5 ROBOT

VTR 5 ROBOT

( SINGLE ARM )

( DUAL ARM )

( SINGLE ARM )


¢Â BROOKS AUTOMATION

 

MAG 7 ROBOT

VCE 3 INDEX

VCE 4 INDEX

( DUAL ARM )

( VACUUM )

( VACUUM )


 

¢Â PRI AUTOMATION (EQUIPE)

 

 

ATM 100 ROBOT

ATM 200 ROBOT

ATM 300 ROBOT

( SINGLE ARM )

( SINGLE ARM )

( SINGLE ARM )


¢Â PRI AUTOMATION (EQUIPE)

 

 

PRE ALIGNER

ATM 100 CONTROLLER

ATM 200/300 CONTROLLER

 

 


 

¢Â MECS AUTOMATION

 

UTC 100 ROBOT

UTC 800 ROBOT

UTC 3400 ROBOT

( SINGLE ARM )

( SINGLE ARM )

( DUAL ARM )


 

¢Â MECS AUTOMATION

 

UTC 100 CONTROLLER

UTC 800 CONTROLLER

UTC 3400 CONTROLLER


¢Â FUSION AUTOMATION

 

FUSION ROBOT

 

 


 

¢Â YASGAWA AUTOMATION

 

 

SV3 ROBOT

SV3 CONTROLLER

 

( MULTI-JOINT )

 

 


 

¢Â YASGAWA AUTOMATION

       XV-RCM4700 ROBOT

XV-RCM4700 CONTROLLER


    

(MULTI-JOINT)

 

¢Â ROBOT INSTALLATION STATE OF EACH SYSTEM

1.  GENMARK ROBOT ASSEMBLY

. CANON STEPPER (APT-5800: CVD PROCESS) GB4

. GENUS SYSTEM (6000: CVD PROCESS) GB3

. AG (MEASUREMENT EQUIPMENT) GB4

. FALCON SYSTEM (ETCH PROCESS) GB4

. ULTRA TECH STEPPER (UTS: PHOTO PROCESS) GB4

. 4-POINT PROBE (OP2600: MEASUREMENT) GB4

 

2.  BROOKS ROBOT ASSEMBLY

. NOVELLUS SYSTEM (CVD PROCESS) MTR5, VTR5, VCE3, VCE4

. GENUS SYSTEM (7000: CVD PROCESS) MTR5, VCE3, VCE4

. GASONIC SYSTEM (ETCH PROCESS) VTR3 (Z-BOT)

. LAM SYSTEM (ETCH PROCESS) MTR5, VTR5, VCE3, VCE4

. JOOSUNG SYSTEM (CVD PROCESS) MTR5

 

3.  EQUIPE ROBOT ASSEMBLY

. THERMA WAVE (OPTI PROBE 2600: MEASUREMENT EQIPMENT) ATM 100, ATM 200

. LASER MARKING (MESUREMENT EQUIPMENT) ATM 100, ATM 200, PRE ALIGNER

. TENCOR (SURFCAN: MEASUREMENT EQUIPMENT) ATM 100, ATM 200

. METRA 2155M (MEASUREMENT EQUIPMENT) ATM 100, ATM 200

. LUMONICS (MEASUREMENT EQUIPMENT) ATM 100, ATM 200

. AIT (MEASUREMENT EQUIPMENT) ATM 100, ATM 200

 

 

 

 

4.  MECS ROBOT ASSEMBLY

. W/J SYSTEM (CVD PROCESS) UTS 800

. CANON SYSTEM (END FAB PROCESS) UTS 100

. SEM (MEASUREMENT EQUIPMENT) UTS 800

. M511AE SYSTEM UTS 100

. MAS 1800 SYSTEM (ETCH PROCESS) UTS 3400

. MAS 8000 SYSTEM (ETCH PROCESS) UTS 1000

. CANON SYSTEM (ETCH PROCESS) UTS 200

 

 

 

 

 

 

 

2. ORGANIZATION


 

 

TOP TECH



 

 



LOCALIZATION OF PRODUCT

 

ROBOT TEAM

 

MANAGEMENT


 

 



REFURBISHMENT

 

LOCALIZATION OF PARTS

 

FIELD SERVICE & SALES

 

REPAIR &

REFURBISHMENT

 

ACCOUNTING

 

FOREIGN AFFAIRS


 

 

 

3. SERVICE CONTRACT


 

 

1.  SAMSUNG ELECTRONICS CO., LTD : KI-HYUNG FACTORY

2.  HYNIX SEMICONDUCTOR INC. : E-CHEON FACTORY

3.  HYNIX SEMICONDUCTOR INC. : CHEON-JU FACTORY

4.  HYNIX SEMICONDUCTOR INC. : GU-MI FACTORY

5.  MEMC KOREA CO., LTD : CHEON-AN FACTORY

6.  LG SILTRON CO., LTD : E-CHEON FACTORY

7.  LG SILTRON CO., LTD : GU-MI FACTORY

8.  FAIRCHILD KOREA : BU-CHEON FACTORY

9.  KOREA ELECTRONICS CO., LTD(K.E.C) : GU-MI FACTORY

10. ANAM CO., LTD : BU-CHEON FACTORY

 

4. LIST OF REPAIRED ROBOTS BY TOPTECH (2001.2002.2003)


 

2003                                                                                                            01/03/03 12/31/03

NO

DESCIPTION

C U S T O M E R

TOTAL Q¡¯TY

SAMSUNG

HYNIX

LG

MEMC

KEC

ANAM

OTHERS

1

GENMARK ROBOT

ASSY & CONTROLLER

50

11

5

3

-

-

3

72

2

EQUIP ROBOT ASSY

& CONTROLLER

14

6

3

4

-

-

2

29

3

PRE ALIGNER ASSY

& CONTROLLER

21

23

5

-

-

1

-

49

4

BROOKS ROBOT

ASSEMBLY

-

27

-

-

-

-

-

27

5

MECS ROBOT ASSY

& CONTROLLER

21

5

-

-

-

2

2

30

6

FUSION ROBOT

ASSEMBLY

10

-

-

-

-

-

-

10

7

OTHER ROBOTS

36

9

-

-

1

-

5

51

TOTAL (Q¡¯TY)

152

81

13

7

1

2

12

268


2002                                                                                                            01/03/02 12/31/02                     

NO

DESCIPTION

CUSTOMER

TOTAL Q¡¯TY

SAMSUNG

HYNIX

LG

POSCO

KEC

MECS

1

GENMARK ROBOT

ASSY & CONTROLLER

81

24

3

-

1

1

110

2

EQUIP ROBOT ASSY

& CONTROLLER

6

22

-

-

-

-

28

3

PRE ALIGNER ASSY

& CONTROLLER

9

13

-

1

-

-

23

4

BROOKS ROBOT

ASSEMBLY

16

16

-

-

-

-

32

5

MECS ROBOT ASSY

& CONTROLLER

8

6

1

-

-

-

15

6

FUSION ROBOT

ASSEMBLY

9

-

-

-

-

-

9

7

OTHER ROBOTS

15

4

-

-

-

-

19

TOTAL (Q¡¯TY)

144

85

4

1

1

1

236


 

 

2001                                                                                                             01/03/01-12/31/01

NO

DESCIPTION

CUSTOMER

TOTAL Q¡¯TY

SAMSUNG

HYNIX

LG

POSCO

KEC

FAIRCHILD

1

GENMARK ROBOT

ASSY & CONTROLLER

35

15

1

-

-

-

51

2

EQUIP ROBOT ASSY

& CONTROLLER

10

25

1

1

2

3

42

3

PRE ALIGNER ASSY

& CONTROLLER

5

10

-

1

-

-

16

4

BROOKS ROBOT

ASSEMBLY

15

11

-

-

-

-

26

5

MECS ROBOT ASSY

& CONTROLLER

10

10

3

-

-

-

23

6

FUSION ROBOT

ASSEMBLY

11

-

-

-

-

-

11

7

OTHER ROBOTS

5

1

-

-

-

-

6

TOTAL (Q¡¯TY)

91

72

5

2

2

3

175


 

5. ROBOT ASSEMBLY


 

NO

PARTS DESCRIPTION

PARTIAL OVERHAUL

(2 YEARS  ~  4 YEARS)

FULL OVERHAUL

(MORE THAN 4 YEARS)

REMARKS

1

M

O

T

O

R

Theta-Axis, Robot

Clean up

Exchange

 

Radial-Axis, Robot

¡¨

¡¨

 

Lift (Z)-Axis, Robot

Exchange

¡¨

 

End / Effect, Robot

Clean up

Exchange

 

V-Motor for Pre-

¡¨

¡¨

 

P-Motor for Pre-

¡¨

¡¨

 

2

B

E

L

T

(9EA)

T-Axis Drive #1

Exchange

Exchange

 

T-Axis Drive #2

¡¨

¡¨

 

R-Axis Drive #1

¡¨

¡¨

 

R-Axis Drive #2

¡¨

¡¨

 

R-Axis Drive #3

¡¨

¡¨

 

R-Axis Drive #4

¡¨

¡¨

 

Z-Axis Drive #1

¡¨

¡¨

 

E/E Drive #1

¡¨

¡¨

 

E/E Drive #2

¡¨

¡¨

 


 

NO

PARTS DESCRIPTION

PARTIAL OVERHAUL

(2 YEARS  ~  4 YEARS)

FULL OVERHAUL

(MORE THAN 4YEARS)

REMARKS

3

B

E

A

R

I

N

G

(16EA)

Z-Axis Shaft #1

Exchange

Exchange

 

Z-Axis Shaft #2

¡¨

¡¨

 

R-Axis Shaft #1

¡¨

¡¨

 

R-Axis Shaft #2

¡¨

¡¨

 

R-Axis Shaft #3

¡¨

¡¨

 

R-Axis Shaft #4

¡¨

¡¨

 

R-Axis Shaft #5

Clean up

¡¨

 

R-Axis Shaft #6

¡¨

¡¨

 

T-Axis Drive #1

Exchange

¡¨

 

T-Axis Drive #2

¡¨

¡¨

 

T-Axis Drive #3

¡¨

¡¨

 

T-Axis Drive #4

Clean up

¡¨

 

Arm Links #1

Exchange

¡¨

 

Arm Links #2

¡¨

¡¨

 

Arm Links #3

¡¨

¡¨

 

Arm Links #4

¡¨

¡¨

 

Arm Links #5

¡¨

¡¨

 

Arm Links #6

¡¨

¡¨

 


 

 

 

NO

PARTS DESCRIPTION

PARTIAL OVERHAUL

(2 YEARS  ~  4 YEARS)

FULL OVERHAUL

(MORE THAN 4 YEARS)

REMARKS

4

S

H

A

F

T

Main Body #1

Clean up

Exchange

 

Vertical #1

¡¨

¡¨

 

Vertical #2

¡¨

¡¨

 

5

P

U

L

L

E

Y

(9EA)

T-Axis Drive #1

Exchange

Exchange

 

T-Axis Drive #2

Clean up

Clean up

 

T-Axis Drive #3

¡¨

¡¨

 

R-Axis Drive #1

Exchange

Exchange

 

R-Axis Drive #2

Clean up

Clean up

 

R-Axis Drive #3

¡¨

¡¨

 

R-Axis Drive #4

¡¨

¡¨

 

R-Axis Drive #5

¡¨

¡¨

 

R-Axis Drive #6

¡¨

¡¨

 

R-Axis Drive #7

¡¨

¡¨

 

Z-Axis Drive #1

Exchange

Exchange

 

Z-Axis Drive #2

Clean up

Clean up

 

Arm Links #1

¡¨

¡¨

 

Arm Links #2

¡¨

¡¨

 

Arm Links #3

¡¨

¡¨

 

Arm Links #4

¡¨

¡¨

 


 

 

NO

PARTS DESCRIPTION

PARTIAL OVERHAUL

(2 YEARS  ~  4 YEARS)

FULL OVERHAUL

(MORE THAN 4 YEARS)

REMARKS

6

Main Leadscrew (2EA)

Clean up & Oil Charge

Exchange

 

7

S

E

N

S

O

R

Vacuum #1

Adjust

Adjust

 

Vacuum #2

¡¨

¡¨

 

T-Axis Home

¡¨

¡¨

 

R-Axis Home

¡¨

¡¨

 

Z-Axis Home

¡¨

¡¨

 


 

 

 

 

 

 

 

LIFE TIME OF EACH PARTS


1)   LIFE TIME OF ROBOT ASSEMBLY

RECOMMENDED BY GENMARK :  5 YEARS (US)

RECOMMENDED IN KOREA    :  4 YEARS (KOREA)

 

2)     LIFE TIME OF PARTS

 

US

KOREA

THETA MOTOR

5 YEARS

3 ~ 4 YEARS

RADIA MOTOR

5 YEARS

3 ~ 4 YEARS

LIFT(Z) MOTOR

4 YEARS

2 ~ 3 YEARS

BEARINGS

5 YEARS

 

BELTS

5 YEARS

Abrasion rate for

2 years (40%)

3 years (60%)

4 years (90%)

PULLEY

7 YEARS

4 years (25%)

5 years (45%)

6 years (80%)

LEADSCREW ASSY

5 ~ 6 YEARS

3 years (30%)

4 years (50%)

5 years (80%)