|
STA : SEMICONDUCTOR
TECHNOLOGY AMERICA |
INDEX
1. COMPANY DESCRIPTION 2. ORGANIZATION 3. SERVICE CONTRACT 4. LIST OF REPAIRED ROBOTS BY STA (2003) 5. ROBOT ASSEMBLY |
|
1. COMPANY DESCRIPTION |
COMPANY: STA :
SEMICONDUCTOR TECHNOLOGY AMERICA
ADDRESS: 4773 Pacific Avenue, Eugene, OR 97402
TEL: 541 344-1170
FAX: 541 344-1187
E-MAIL: bhjang@stamerica.com
◈ BUSINESS
DESCRIPTION
♣ ROBOT
REPAIR & OVERHAUL
(TRANSPORT AND MEASUREMENT EQUIPMENT FOR LCD & FAB SYSTEM)
♣ ROBOT UP-GRADE
♣ ROBOT REFURBISHMENT
◈ ROBOT MAKER
♣ GENMARK ROBOT ASSEMBLY & CONTROLLER
(MODEL: GB3, GB4, GB4P, PRE
ALIGNER)
♣ BROOKS ROBOT ASSEMBLY
(MODEL: MTR5, VTR5, Z-BOT)
♣ PRI (EQUIPE) ROBOT & PRE ALIGNER
ASSY & CONTROLLER
(MODEL: ATM-100, ATM-200, PRE ALIGNER)
♣ MECS ROBOT ASSEMBLY & CONTROLLER
(MODEL: UTS-100, 200, 800, 1000, 3400)
♣ FUSION ROBOT ASSEMBLY
♣ YASGAWA ROBOT ASSEMBLY ( MODEL : SV3 )
◈ GENMARK
AUTOMATION
GB3
ROBOT
|
GB4
ROBOT
|
GB4P
ROBOT
|
|
( 2 LINKS ) |
( 3 LINKS ) |
(2 LINKS ) |
◈ GENMARK
AUTOMATION
|
GB7 ROBOT |
GB8 ROBOT |
GPR-SM ROBOT |
|
|
( MULTI-JOINT ) |
( MULTI-JOINT ) |
|
(MULTI-JOINT) |
|
|
|
|
||
◈ GENMARK
AUTOMATION
|
GB4P CONTROLLER |
GB4 CONTROLLER |
GB3 CONTROLLER |
|
|
|
|
◈ BROOKS
AUTOMATION
|
Z-BOT ROBOT |
MTR 5 ROBOT |
VTR 5 ROBOT |
|
( SINGLE ARM ) |
( DUAL ARM ) |
( SINGLE ARM ) |
◈ BROOKS
AUTOMATION
|
MAG 7 ROBOT |
VCE 3 INDEX |
VCE 4 INDEX |
|
( DUAL ARM ) |
( VACUUM ) |
(
VACUUM ) |
◈ PRI
AUTOMATION (EQUIPE)
|
ATM 100 ROBOT |
ATM
200 ROBOT |
ATM
300 ROBOT |
|
(
SINGLE ARM ) |
(
SINGLE ARM ) |
(
SINGLE ARM ) |
◈ PRI
AUTOMATION (EQUIPE)
|
PRE ALIGNER |
ATM 100 CONTROLLER |
ATM 200/300 CONTROLLER |
|
|
|
|
◈ MECS
AUTOMATION
|
UTC
100 ROBOT |
UTC
800 ROBOT |
UTC 3400 ROBOT |
|
(
SINGLE ARM ) |
(
SINGLE ARM ) |
(
DUAL ARM ) |
◈ MECS
AUTOMATION
|
UTC
100 CONTROLLER |
UTC 800 CONTROLLER |
UTC
3400 CONTROLLER |
|
|
|
|
◈ FUSION
AUTOMATION
|
FUSION ROBOT |
|
|
|
|
◈ YASGAWA
AUTOMATION
|
SV3
ROBOT |
SV3
CONTROLLER |
|
|
(
MULTI-JOINT ) |
|
|
◈ YASGAWA AUTOMATION
|
XV-RCM4700
ROBOT |
XV-RCM4700
CONTROLLER |
(MULTI-JOINT)
◈ ROBOT INSTALLATION
STATE OF EACH SYSTEM
1. GENMARK ROBOT ASSEMBLY
. CANON STEPPER (APT-5800: CVD PROCESS) – GB4
. GENUS SYSTEM (6000: CVD PROCESS) – GB3
. AG (MEASUREMENT EQUIPMENT) – GB4
. FALCON SYSTEM (ETCH PROCESS) – GB4
. ULTRA TECH STEPPER (UTS: PHOTO PROCESS) – GB4
. 4-POINT PROBE (OP2600: MEASUREMENT) – GB4
2. BROOKS ROBOT ASSEMBLY
. NOVELLUS SYSTEM (CVD PROCESS) – MTR5, VTR5, VCE3, VCE4
. GENUS SYSTEM (7000: CVD PROCESS) – MTR5, VCE3, VCE4
. GASONIC SYSTEM (ETCH PROCESS) – VTR3 (Z-BOT)
. LAM SYSTEM (ETCH PROCESS) – MTR5, VTR5, VCE3, VCE4
. JOOSUNG SYSTEM (CVD PROCESS) – MTR5
3. EQUIPE ROBOT ASSEMBLY
. THERMA WAVE (OPTI PROBE 2600: MEASUREMENT EQIPMENT) – ATM 100, ATM 200
. LASER MARKING (MESUREMENT EQUIPMENT) – ATM 100, ATM 200, PRE ALIGNER
. TENCOR (SURFCAN: MEASUREMENT EQUIPMENT) – ATM 100, ATM 200
. METRA 2155M (MEASUREMENT EQUIPMENT) – ATM 100, ATM 200
. LUMONICS (MEASUREMENT EQUIPMENT) – ATM 100, ATM 200
. AIT (MEASUREMENT EQUIPMENT) – ATM 100, ATM 200
4. MECS ROBOT ASSEMBLY
. W/J SYSTEM (CVD PROCESS) – UTS 800
. CANON SYSTEM (END FAB PROCESS) – UTS 100
. SEM (MEASUREMENT EQUIPMENT) – UTS 800
. M511AE SYSTEM – UTS 100
. MAS 1800 SYSTEM (ETCH PROCESS) – UTS 3400
. MAS 8000 SYSTEM (ETCH PROCESS) – UTS 1000
. CANON SYSTEM (ETCH PROCESS) – UTS 200
|
2.
ORGANIZATION |
|
STA : SEMICONDUCTOR TECHNOLOGY AMERICA |
|
LOCALIZATION OF PRODUCT |
|
ROBOT TEAM |
|
MANAGEMENT |
|
REFURBISHMENT |
|
LOCALIZATION OF PARTS |
|
FIELD SERVICE & SALES |
|
REPAIR & REFURBISHMENT |
|
ACCOUNTING |
|
FOREIGN AFFAIRS |
|
3.
SERVICE CONTRACT |
|
1. SAMSUNG ELECTRONICS CO., LTD : KI-HYUNG FACTORY 2. HYNIX SEMICONDUCTOR INC. : E-CHEON FACTORY 3. HYNIX SEMICONDUCTOR INC. : CHEON-JU FACTORY 4. HYNIX SEMICONDUCTOR INC. : GU-MI FACTORY 5. MEMC KOREA CO., LTD : CHEON-AN
FACTORY 6. LG SILTRON CO., LTD : E-CHEON FACTORY 7. LG SILTRON CO., LTD : GU-MI FACTORY 8. FAIRCHILD 9. KOREA ELECTRONICS CO., LTD(K.E.C) : GU-MI FACTORY 10. ANAM CO., LTD : BU-CHEON FACTORY |
|
|
4. LIST OF REPAIRED ROBOTS BY STA (2001.2002.2003) |
||
2003 01/03/03– 12/31/03
|
NO |
DESCIPTION |
C
U S T O M E R |
TOTAL
Q’TY |
||||||
|
SAMSUNG |
HYNIX |
LG |
MEMC |
KEC
|
ANAM |
OTHERS |
|||
|
1 |
GENMARK ROBOT
ASSY & CONTROLLER
|
50 |
11 |
5 |
3 |
- |
- |
3 |
72 |
|
2 |
EQUIP
ROBOT ASSY &
CONTROLLER |
14 |
6 |
3 |
4 |
- |
- |
2 |
29 |
|
3 |
PRE
ALIGNER ASSY &
CONTROLLER |
21 |
23 |
5 |
- |
- |
1 |
- |
49 |
|
4 |
BROOKS
ROBOT ASSEMBLY |
- |
27 |
- |
- |
- |
- |
- |
27 |
|
5 |
MECS
ROBOT ASSY &
CONTROLLER |
21 |
5 |
- |
- |
- |
2 |
2 |
30 |
|
6 |
FUSION
ROBOT ASSEMBLY |
10 |
- |
- |
- |
- |
- |
- |
10 |
|
7 |
OTHER
ROBOTS |
36 |
9 |
- |
- |
1 |
- |
5 |
51 |
|
TOTAL
(Q’TY) |
152 |
81 |
13 |
7 |
1 |
2 |
12 |
268 |
|
2002 01/03/02– 12/31/02
|
NO |
DESCIPTION |
CUSTOMER |
TOTAL
Q’TY |
|||||
|
SAMSUNG |
HYNIX |
LG |
POSCO |
KEC
|
MECS |
|||
|
1 |
GENMARK ROBOT
ASSY & CONTROLLER
|
81 |
24 |
3 |
- |
1 |
1 |
110 |
|
2 |
EQUIP
ROBOT ASSY &
CONTROLLER |
6 |
22 |
- |
- |
- |
- |
28 |
|
3 |
PRE
ALIGNER ASSY &
CONTROLLER |
9 |
13 |
- |
1 |
- |
- |
23 |
|
4 |
BROOKS
ROBOT ASSEMBLY |
16 |
16 |
- |
- |
- |
- |
32 |
|
5 |
MECS
ROBOT ASSY &
CONTROLLER |
8 |
6 |
1 |
- |
- |
- |
15 |
|
6 |
FUSION
ROBOT ASSEMBLY |
9 |
- |
- |
- |
- |
- |
9 |
|
7 |
OTHER
ROBOTS |
15 |
4 |
- |
- |
- |
- |
19 |
|
TOTAL
(Q’TY) |
144 |
85 |
4 |
1 |
1 |
1 |
236 |
|
2001 01/03/01-12/31/01
|
NO |
DESCIPTION |
CUSTOMER |
TOTAL
Q’TY |
|||||
|
SAMSUNG |
HYNIX |
LG |
POSCO |
KEC |
FAIRCHILD |
|||
|
1 |
GENMARK ROBOT
ASSY & CONTROLLER
|
35 |
15 |
1 |
- |
- |
- |
51 |
|
2 |
EQUIP
ROBOT ASSY &
CONTROLLER |
10 |
25 |
1 |
1 |
2 |
3 |
42 |
|
3 |
PRE
ALIGNER ASSY &
CONTROLLER |
5 |
10 |
- |
1 |
- |
- |
16 |
|
4 |
BROOKS
ROBOT ASSEMBLY |
15 |
11 |
- |
- |
- |
- |
26 |
|
5 |
MECS
ROBOT ASSY &
CONTROLLER |
10 |
10 |
3 |
- |
- |
- |
23 |
|
6 |
FUSION
ROBOT ASSEMBLY |
11 |
- |
- |
- |
- |
- |
11 |
|
7 |
OTHER
ROBOTS |
5 |
1 |
- |
- |
- |
- |
6 |
|
TOTAL
(Q’TY) |
91 |
72 |
5 |
2 |
2 |
3 |
175 |
|
|
5. ROBOT ASSEMBLY |
|
NO |
PARTS DESCRIPTION |
PARTIAL OVERHAUL (2 YEARS ~
4 YEARS) |
FULL OVERHAUL (MORE THAN 4 YEARS) |
REMARKS |
|
|
1 |
M O T O R |
Theta-Axis, Robot
|
Clean up |
Exchange |
|
|
Radial-Axis, Robot |
〃 |
〃 |
|
||
Lift (Z)-Axis, Robot
|
Exchange |
〃 |
|
||
|
End / Effect, Robot |
Clean up |
Exchange |
|
||
|
V-Motor for Pre- |
〃 |
〃 |
|
||
|
P-Motor for Pre- |
〃 |
〃 |
|
||
|
2 |
B E L T (9EA) |
|
Exchange |
Exchange |
|
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
Z-Axis Drive #1 |
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
NO |
PARTS DESCRIPTION |
PARTIAL OVERHAUL (2 YEARS ~
4 YEARS) |
FULL OVERHAUL (MORE THAN 4YEARS) |
REMARKS |
|
|
3 |
B E A R I N G (16EA) |
Z-Axis Shaft #1 |
Exchange |
Exchange |
|
|
Z-Axis Shaft #2 |
〃 |
〃 |
|
||
|
R-Axis Shaft #1 |
〃 |
〃 |
|
||
|
R-Axis Shaft #2 |
〃 |
〃 |
|
||
|
R-Axis Shaft #3 |
〃 |
〃 |
|
||
|
R-Axis Shaft #4 |
〃 |
〃 |
|
||
|
R-Axis Shaft #5 |
Clean
up
|
〃 |
|
||
|
R-Axis Shaft #6 |
〃 |
〃 |
|
||
|
|
Exchange |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
Clean up |
〃 |
|
||
|
Arm Links #1 |
Exchange |
〃 |
|
||
|
Arm Links #2 |
〃 |
〃 |
|
||
|
Arm Links #3 |
〃 |
〃 |
|
||
|
Arm Links #4 |
〃 |
〃 |
|
||
|
Arm Links #5 |
〃 |
〃 |
|
||
|
Arm Links #6 |
〃 |
〃 |
|
||
|
NO |
PARTS DESCRIPTION |
PARTIAL OVERHAUL (2 YEARS ~
4 YEARS) |
FULL OVERHAUL (MORE THAN 4 YEARS) |
REMARKS |
|
|
4 |
S H A F T |
Main Body #1 |
Clean up |
Exchange |
|
|
Vertical #1 |
〃 |
〃 |
|
||
|
Vertical #2 |
〃 |
〃 |
|
||
|
5 |
P U L L E Y (9EA) |
|
Exchange |
Exchange |
|
|
|
Clean up |
Clean up |
|
||
|
|
〃 |
〃 |
|
||
|
|
Exchange |
Exchange |
|
||
|
|
Clean up |
Clean up |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
|
〃 |
〃 |
|
||
|
Z-Axis Drive #1 |
Exchange |
Exchange |
|
||
|
Z-Axis Drive #2 |
Clean up |
Clean up |
|
||
|
Arm Links #1 |
〃 |
〃 |
|
||
|
Arm Links #2 |
〃 |
〃 |
|
||
|
Arm Links #3 |
〃 |
〃 |
|
||
|
Arm Links #4 |
〃 |
〃 |
|
||
|
NO |
PARTS DESCRIPTION |
PARTIAL OVERHAUL (2 YEARS ~
4 YEARS) |
FULL OVERHAUL (MORE THAN 4 YEARS) |
REMARKS |
|
|
6 |
Main
Leadscrew (2EA) |
Clean
up & Oil Charge |
Exchange |
|
|
|
7 |
S E N S O R |
Vacuum #1 |
Adjust |
Adjust |
|
|
Vacuum #2 |
〃 |
〃 |
|
||
|
T-Axis Home |
〃 |
〃 |
|
||
|
R-Axis Home |
〃 |
〃 |
|
||
|
Z-Axis Home |
〃 |
〃 |
|
||
|
LIFE
TIME OF EACH PARTS |
1)
LIFE TIME OF ROBOT ASSEMBLY
RECOMMENDED BY GENMARK : 5 YEARS (US)
RECOMMENDED IN KOREA : 4 YEARS (KOREA)
2)
LIFE TIME OF PARTS
|
|
US
|
|
|
THETA MOTOR |
5 YEARS |
3 ~ 4 YEARS |
|
RADIA MOTOR |
5 YEARS |
3 ~ 4 YEARS |
|
LIFT(Z) MOTOR |
4 YEARS |
2 ~ 3 YEARS |
|
BEARINGS |
5 YEARS |
|
|
BELTS |
5 YEARS |
Abrasion rate for 2 years (40%) 3 years (60%) 4 years (90%) |
|
PULLEY |
7 YEARS |
4 years (25%) 5 years (45%) 6 years (80%) |
|
LEADSCREW ASSY |
5 ~ 6 YEARS |
3 years (30%) 4 years (50%) 5 years (80%) |